====== Fe (5000) into Layer 1                   =======
        SRIM-2013.00
==================================================
      ION and final RECOIL ATOM Distributions     
 See  SRIM Outputs\TDATA.txt for calculation details
==================================================
See file :  SRIM Outputs\TDATA.txt   for details of calculation
 Ion    = Fe   Energy = 5000  keV
============= TARGET MATERIAL ======================================
Layer  1 : Layer 1
Layer Width =     4.E+04 A   Layer # 1- Density = 2.925E22 atoms/cm3 = 7.008 g/cm3
  Layer # 1- Nd = 100  Atomic Percent = 100  Mass Percent
====================================================================
 Total Ions calculated =1001.00
 Ion Average Range =   222.7E+02 A   Straggling =   537.0E+01 A
 Ion Lateral Range =   552.6E+01 A   Straggling =   680.0E+01 A
 Ion Radial  Range =   848.5E+01 A   Straggling =   428.5E+01 A
====================================================================
 Transmitted Ions =;  Backscattered Ions =2
 (These are not included in Skewne- and Kurtosis below.)

 Range Skewne- = -000.6999  &= [-(X-Rp)^3]/[N*Straggle^3]
 Range Kurtosis = 003.3022  &= [-(X-Rp)^4]/[N*Straggle^4]
 Statistical definitions above are those used in VLSI implant modelling.
====================================================================
=================================================================
  Table Distribution Units are >>>  (Atoms/cm3) / (Atoms/cm2)  <<<  
=================================================================
   DEPTH         Fe         Nd    
   (Ang.)       Ions     Tgt. Atoms
-----------  ----------  ----------
400010.E-03  0.0000E+00  1.3213E+07
800010.E-03  0.0000E+00  2.0274E+07
120001.E-02  0.0000E+00  2.4135E+07
160001.E-02  0.0000E+00  2.2982E+07
200001.E-02  2.4975E+02  2.5049E+07
240001.E-02  0.0000E+00  2.7188E+07
280001.E-02  0.0000E+00  3.0219E+07
320001.E-02  2.4975E+02  2.7386E+07
360001.E-02  0.0000E+00  2.8386E+07
400001.E-02  0.0000E+00  2.9054E+07
440001.E-02  2.4975E+02  2.7989E+07
480001.E-02  0.0000E+00  2.8845E+07
520001.E-02  2.4975E+02  2.7446E+07
560001.E-02  4.9950E+02  3.0248E+07
600001.E-02  4.9950E+02  3.4585E+07
640001.E-02  4.9950E+02  3.7345E+07
680001.E-02  9.9900E+02  3.3957E+07
720001.E-02  0.0000E+00  4.3706E+07
760001.E-02  2.4975E+02  3.7063E+07
800001.E-02  0.0000E+00  3.7716E+07
840001.E-02  0.0000E+00  4.6061E+07
880001.E-02  4.9950E+02  4.1561E+07
920001.E-02  7.4925E+02  4.2852E+07
960001.E-02  1.2488E+03  4.0088E+07
100000.E-01  1.7483E+03  4.4141E+07
104000.E-01  2.4975E+02  4.4801E+07
108000.E-01  1.2488E+03  4.8642E+07
112000.E-01  0.0000E+00  4.3894E+07
116000.E-01  1.2488E+03  5.0406E+07
120000.E-01  1.9980E+03  5.0619E+07
124000.E-01  1.2488E+03  5.4874E+07
128000.E-01  1.4985E+03  5.6813E+07
132000.E-01  2.7473E+03  5.5864E+07
136000.E-01  1.2488E+03  5.5391E+07
140000.E-01  2.2478E+03  5.7149E+07
144000.E-01  1.4985E+03  6.4667E+07
148000.E-01  2.2478E+03  6.0080E+07
152000.E-01  1.9980E+03  6.2433E+07
156000.E-01  2.4975E+03  6.9471E+07
160000.E-01  3.2468E+03  6.8554E+07
164000.E-01  1.7483E+03  6.0884E+07
168000.E-01  3.2468E+03  6.7561E+07
172000.E-01  4.4955E+03  7.3948E+07
176000.E-01  3.7463E+03  7.8406E+07
180000.E-01  3.2468E+03  7.5817E+07
184000.E-01  5.2448E+03  7.1074E+07
188000.E-01  3.4965E+03  7.6564E+07
192000.E-01  4.9950E+03  7.0377E+07
196000.E-01  4.4955E+03  7.4915E+07
200000.E-01  5.7443E+03  8.1364E+07
204000.E-01  6.2438E+03  7.9668E+07
208000.E-01  3.4965E+03  7.4978E+07
212000.E-01  6.4935E+03  6.8119E+07
216000.E-01  7.7423E+03  7.1320E+07
220000.E-01  5.4945E+03  7.2836E+07
224000.E-01  8.7413E+03  7.8802E+07
228000.E-01  5.9940E+03  7.5359E+07
232000.E-01  9.7403E+03  7.3327E+07
236000.E-01  8.7413E+03  7.2179E+07
240000.E-01  7.2428E+03  6.4403E+07
244000.E-01  1.0240E+04  6.8442E+07
248000.E-01  8.2418E+03  6.0163E+07
252000.E-01  6.9930E+03  5.5290E+07
256000.E-01  8.2418E+03  5.0593E+07
260000.E-01  7.9920E+03  4.4801E+07
264000.E-01  7.9920E+03  4.2965E+07
268000.E-01  6.9930E+03  3.7559E+07
272000.E-01  4.4955E+03  2.9396E+07
276000.E-01  7.2428E+03  2.7853E+07
280000.E-01  5.2448E+03  2.2142E+07
284000.E-01  5.2448E+03  1.9193E+07
288000.E-01  5.9940E+03  2.3158E+07
292000.E-01  4.2458E+03  1.3424E+07
296000.E-01  4.2458E+03  1.1715E+07
300000.E-01  2.4975E+03  9.6828E+06
304000.E-01  2.4975E+03  6.2023E+06
308000.E-01  1.7483E+03  5.2505E+06
312000.E-01  1.2488E+03  3.3996E+06
316000.E-01  1.4985E+03  2.6633E+06
320000.E-01  1.7483E+03  3.8969E+06
324000.E-01  4.9950E+02  7.6224E+05
328000.E-01  0.0000E+00  2.6474E+05
332000.E-01  4.9950E+02  6.1638E+05
336000.E-01  2.4975E+02  2.2552E+05
340000.E-01  0.0000E+00  1.8482E+04
344000.E-01  2.4975E+02  8.2942E+05
348000.E-01  0.0000E+00  4.3207E+04
352000.E-01  0.0000E+00  0.0000E+00
356000.E-01  0.0000E+00  0.0000E+00
360000.E-01  0.0000E+00  0.0000E+00
364000.E-01  0.0000E+00  0.0000E+00
368000.E-01  0.0000E+00  0.0000E+00
372000.E-01  0.0000E+00  0.0000E+00
376000.E-01  0.0000E+00  0.0000E+00
380000.E-01  0.0000E+00  0.0000E+00
384000.E-01  0.0000E+00  0.0000E+00
388000.E-01  0.0000E+00  0.0000E+00
392000.E-01  0.0000E+00  0.0000E+00
396000.E-01  0.0000E+00  0.0000E+00
400000.E-01  0.0000E+00  0.0000E+00
